Apparatus for high vacuum pumps



March 11, 1958 M. AuWRTr-:R ETAL APPARATUS PoR HAGH VACUUM PUMPS FledrMarOh 17, 1951- Yhigh vacuum pump'sf arev already known?. y v Apun/1pstandsA the chamber or spaee to'he evacuatedi is fn'teltihgf and casting cation of thin`- surface layers by" means' of? high vacuum evaporation; ofi' the" materials necessary* for! the sa'me'.

sethat the high vacuum United 1i Y Y 2316553 APBARA'FUSPrv FOR HIGH BUMBS Max Anwrter and-.f tto Winkler; Balzersgf Liechtenstein,

assglrlorsA to; AloieiVgt, fVaduz, Liechtenstein Application Marcin- 11, 195`1,.Ser"ialy l`rf21623i` i einmaprimnypapglicaann:switaenandiMarehizz; 195o y i Sififlaiis.A g. Z30-j-Zlf High vac'tiu'rhp'urripjl standsn comprising preliminary l and WithA these being now put into connection with the' high" yac'u'um 'vacum pump" before" reachingv the" preliminary! vacuum.

"finis:l requires too muc' time with nignf vae mi pump stands; which,-4v byy reasonl or the nature or theff working processes to; be performed; must@ be2 repeatedly: needed 'a'rid again highly evacuatedi afterwards, because'`-` considersuus fomfdieadditionarueatingzand g; Suclworking methods oc'curl with plants; and witlpliit'sfor?L thei appliable foss*` o'fi' timef cooling dbwnlperr" 0n course; the; attendance of'se many valves: involves danger" iftlie' operators; are unskilled? l-'ve'ry wrongmal- Vnipnlatien;of thevalves leads not"l only tof-disturhaneesr-in ni' course' eff die* pumping operations andi tnerewitn te lossfo'f" time', but. also 1 to: damage andi des'truetio'ni of? high- `grade; materials exposedl to,A saidf t'reatinents.V There: is: a

fili-therv dangerY o'ffdam'aging'valuableajrldexpetsiveiequipment, especially the high vacuum pumps, the saine' being designed as diffusion or' steam jet pnips Hence ithas'A already been suggested' to"` connect` the Vpreliminary vacuumvvaliie mechanically nls'ucll a' way with' the higti vacuum` valve that: no wrong manipulations can occur. However, the known arrangements'h'ad led to various disadi'anta'g'es and dilicltieswhich".A arev eliminated by the sttuctiireandmodeof operation or: the present invention; TheV improvement etected by? our invention is characterized by the-provisi'riof afii'rstfspa'ce forming o'r connected-with the spa'ceior"cliarnber*l to be evacuated; a secondi spaceor chamberconnected to=the preliminary vacuum pump Land` connectible witlf the' ev acuatiogn space, and a thi'rdv space or chamber connected to the high vacumy pu'mp and.` connectible withA the second space so. as :to connect the latter toL the high'vacuum pump, and interconnected alternately in suchi a.vv manner that'eithe'r, on shuttingfolv the r'st'spac'eagainst the high vacuum pump` and closingthe' third space against the secondl space, thelatter is` causcdto joingthe` preliminary vacuum pump with the iirst space, occasioning" thereby vthe preliminaryI vacuum-formation;or on shutting off the second space against the rst space and connecting the third and se'condl spaces, thev4 high'Y vacum` pump is connected with the first space while the preliminaryvacuum pump vi's swit'cle'd inseri'e's'with the high vacuum' pump, is established with the aid' of both pumps.' working' simultaneously;

2,826,353 intenable-lbi* Following thei method.-J asi` described above,;- the possibility?y arises for the .iirstj time withY sushi high vacuum stands of allowing4 the arrangementA ofthe first, second, andthirdspaces-:side byf side, toi dispose themdn thefsame common casing, andii tQpenetra-tefthe first, second, and third; spacesbyv mea-ns. of af single*` actuating element, passingionly:v thrufone-point of theicasing,n which operates the) connectingy and? shutotf-v rn'eansbetween theY high vacuumpump' andT first; space, as wellfas ontsuchmeans disposed between; they firsti and seejond4 andbetweenf the secondand` third spaeest` @onsequently this single actuating element, can be switchediinto'. thegdesired position without any dangeron wrongimanipulation, andlwithout any. danger!r of disturbances or` damage. The-only? possibilityF of:- wrong: manipulation consists:l in the tact that switching over from preliminary vacuum to high vacuum canoccur too` early. Butthis dangerl canonly appear if there is; anerror iii-reading; the measuring devices, which generally must be regarded as'` excluded.

The' drawing; appended hereto shows an apparatus adapted? for the execution of the novel; method; and-havingf the described characteristies, byrway; of illustration.-

A Fig. 14 of the schematicallyY presented drawing indicates they position oi they valves whenA producingy the preliminary vacuum; u i,

Fig, 2 shows them-rangement followinglcig.- 1 and the position of the valves when producingnthe high vacuum.

In Fig., 1, 1 indicates thev evacuationspacey or? chamber to"A be` submitted to themhighi vacuum;l inthe 'sense of the invention` under considerationnitf hasbeenA designated as the rst space or chamber. This first space is connected by way of an intermediate. space2.bearinglthefvalvel box 3T, and by way of they high vacuumfvalvcjinfthe form of pla'teS` with the highcvacuumpurp, 4.- lhe high vacuum pump 4 is constructed thruout asa-diiusion-Y or steam-jet pump, and-especially` as an. oil di-ifusionfor oilmvapor jet pump. The valve box, 3' contains. first alvalvechamber 6' designated in thesense of the present-invention= asthe secondn space. or chamber, and` moreover a# further valve chamber 7`fo'r1r1ingrthe1 thirdspace inthe sense of the inventionf under' consideration. A` preliminary vacuum pump formedin the usual way and driven by an electric motor 8 bears the number 9. Accordingly the drawing showsrthat there are first, of all spaces 1', 2` formingrthe evacuation space; thatthere, is lfurther a second? space formed: by the valve4 chamber 6 linking.Y the; preliminary vacuum pump 9x through` conduit` 1'0h together withthe evacuation spaces 1, 2; and iinally a.4 tliird-v space formed bythe valvel chamber 7' unitingy secondi space 6x through conduitll, compensation vessel'IZ,I and conduit 13'A with the high vacuum' pump 4. Thereby the iiist, secondand third spaces 2, 6 and '7v are penetrated by a singlev actuating'ele'mentin the form ofi valve spindle 14, the, position of which is variable following its dependence on. handwheel 153 By this means' the valvedisk' 15, proyided upon valve spindle 14, locks in the positionw ofiv Fig. 1 the second space 6 from the-third' space 7. Onthe other hand, the second valve disk 16, borne by spindle14eis in Fig. 1 in al position where it connects spaces 1 Z with second" space 6.7 Linkedwith valve spindle 14 we find at 17 the toggle lever 18which ishingedat 19: inthe wall bracket 20'. Said wall4 bracket 2l)` forms at. 21y a fui-ther' link point' for the short link ZZv which is hinged'at 23; upon a projectionj2`4 of valve plate'Sl Projection 24 has hinged to it at 25 the toggle lever 1'8". By this special system of'couplng a link triangle 1719',.andV 25 withr a link triangle 21, 23, 254 the result isattained that the vacuum` plate 5', when it isbroughtto the position shown in Fig. 2', extends parallel tothe direction of ow in the spaces` I, 2 and high vacuum pump 4, so that itcauses the least' resistance to theow.

The valve spindle I4' is' discontinuou'sat'26. The point of interruption is bridged by a helical spring 27, so that the valve disks and 16 rest firmly upon their seats in the respective end positions of valve spindle 14. The point where spindle 14 passes through valve box 3 is packed in a high vacuum resistant manner, as indicated at 28. A ood valve is shown at 29.

The mode of operation of the so described parts is readily apparent from the drawing.

As can be seen from Fig. 1, with the valve spindle 14 moved as far as possible to the left, all the parts are in the position in which the preliminary vacuum has been created. This has been expected by shutting o the spaces 1, 2 from high vacuum pump 4 by means of the closed high vacuum valve S, while the third space 7 is shut off from the second space 6 by bringing the valve disk 15 to its seat, and by the illustrated open position of valve disk 16, so that the second space 6 connects the preliminary vacuum pump 9 through conduit 10 with the spaces 1, 2.

Fig. 2, on the other hand, shows the position of valve spindle 14 in which it is moved as far as possible to the right, whereby all the parts have taken the position in which the formation of the high vacuum is reached. Thus the second and third spaces 6 and 7 are connected through the opened valve disk 15', the second space 6 being shut ofi from the spaces 1, 2 by means of the closed valve disk 16. The preliminary vacuum pump 9 is simultaneously in communication, through conduit 1G, the second space 6, the already mentioned open valve disk 15', the third space 7, the conduit 11, the compensation vessel 12 and the conduit 13, with the spaces 1, 2 through the high vacuum pump 4, so that said high vacuum pump 4 is finally connected in series with the preliminary vacuum pump 9.

With the above-described aparatus, therefore, erroneous operation is entirely excluded when the valve spindle 14 is shifted into its extreme positions, assuming that the reversal from preliminary vacuum to high vacuum position is carried out at the right moment. Both operations can be expected from and performed also by unskilled attendants without any danger of error, so that the arrangement illustrated herein removes all the difficulties which prior to the present invention gave occasion for endangering of the pump plant and the materials being treated.

What we claim is:

l. High vacuum pump arrangement comprising, in combination, a fore vacuum pump having a relatively higher end pressure, a high vacuum pump having a lower end pressure, said high vacuum pump including a casing providing a first chamber adapted to be placed in continuous communication with a vessel which is to be highly evacuated, a casing providing a second chamber communicating with the fore pump and also a third chamber communicating with the high vacuum pump, a connection between the second and third chambers, valve means for controlling the connection between the second and third chambers, valve means controlling the communication between the high vacuum pump and the first chainber, connections between said valve means and disposed in said chambers for effecting coordinating movement of said valve means, and a single actuating element connected to the Valve means for operating the same.

2. High vacuum arrangement as defined in claim l, wherein said connections include a resilient member for providing for relative movement between the valve means upon operation of the actuating element.

3. A high vacuum pump arrangement comprising a high vacuum pump having a casing providing a vacuum chamber adapted to be connected to a vessel to be evacuated, a first valve controlling the communication between the high vacuum pump and such vacuum chamber, a valve housing providing a second chamber and a third chamber, means providing a connection between the second and third chambers, means providing a connection between the vacuum chamber and the second chamber, a second valve controlling the connection between the vacuum and second chambers, a third valve controlling the connection between the second and third chambers, a fore pump, a conduit connecting the fore pump with the second chamber, a conduit connecting the high vacuum pump with the third chamber, a single operating means for said valves, and means interconnecting said valves and said single operating means so that upon opening of the second valve, the first and third valves are closed, while upon closing of the second valve, the first and third valves are opened, the first valve being in the form of a plate valve, and the interconnecting means, including a linkage between the first and second valves whereby upon closing of the second valve, the

first valve is opened and turned into position with the.

plane thereof parallel to the direction of flow of gas through the first chamber so as to keep the resistance to such fiow small.

4. A high vacuum pump arrangement comprising a high vacuum pump, a fore pump, a casing providing a vacuum chamber adapted to be connected to a vessel to be evacuated, a passageway connecting the vacuum chamber and the high vacuum pump, a valve housing providing a second chamber and a third chamber in communication with each other, means connecting the second chamber with the vacuum chamber and with the fore pump, means connecting the third chamber with the high vacuum pump, a single adjusting mechanism penetrating said second and third chambers and provided with a first valve controlling the passageway between the vacuum chamber and the high vacuum pump, with a second valve controlling the connecting means between the vacuum and second chambers, and with a third valve controlling the communication between the second and third chambers, so that in the one end position of the adjusting mechanism serving for the production of the preliminary vacuum, the vacuum chamber and the fore pump are connected by way of the second chamber, while the connections to the high vacuum pump are closed, and in the other end position of the adjusting mechanism serving for the production of a high vacuum, the first valve is in open position while the second valve is in closed and the second and third chambers are connected with each other and with the fore and high vacuum pumps, so that the pumps operate in series and are connected through the second and third chambers.

5. A high vacuum pump arrangement according to claim 4, wherein the adjusting mechanism passes through the valve housing at one end thereof, and a single packing for sealing said adjusting mechanism against the valve housing.

6. A high vacuum pump arrangement according to claim 4, wherein the valve housing consists of a single integral block which is hollowed out to provide the said second and third chambers.

7. A high vacuum pump arrangement according to claim 4, wherein the adjusting mechanism comprises a rod having a point of discontinuity, and a coupling spring bridging said point of discontinuity.

8. A high vacuum pump arrangement according to claim 4, wherein the first valve is in the form of a plate Valve, said adjusting mechanism including a linkage connected to the said plate valve in such manner that in the open position of the plate valve, such plate valve extends parallel to the direction of iiow of the medium to be evacuated.

References Cited in the file of this patent UNITED STATES PATENTS 1,307,999 Buckley June 24, 1919 2,063,665 Edwards Dec. 8, 1936 2,263,913 Bargeboer Nov. 25, 1941 2,557,584 Wishart et al June 19, ll 

